JPH0549922B2 - - Google Patents

Info

Publication number
JPH0549922B2
JPH0549922B2 JP58028597A JP2859783A JPH0549922B2 JP H0549922 B2 JPH0549922 B2 JP H0549922B2 JP 58028597 A JP58028597 A JP 58028597A JP 2859783 A JP2859783 A JP 2859783A JP H0549922 B2 JPH0549922 B2 JP H0549922B2
Authority
JP
Japan
Prior art keywords
components
polarized light
light
optical path
polarized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58028597A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59154309A (ja
Inventor
Hiroyuki Kurita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP2859783A priority Critical patent/JPS59154309A/ja
Publication of JPS59154309A publication Critical patent/JPS59154309A/ja
Publication of JPH0549922B2 publication Critical patent/JPH0549922B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2859783A 1983-02-24 1983-02-24 面形状測定用干渉計 Granted JPS59154309A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2859783A JPS59154309A (ja) 1983-02-24 1983-02-24 面形状測定用干渉計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2859783A JPS59154309A (ja) 1983-02-24 1983-02-24 面形状測定用干渉計

Publications (2)

Publication Number Publication Date
JPS59154309A JPS59154309A (ja) 1984-09-03
JPH0549922B2 true JPH0549922B2 (en]) 1993-07-27

Family

ID=12252994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2859783A Granted JPS59154309A (ja) 1983-02-24 1983-02-24 面形状測定用干渉計

Country Status (1)

Country Link
JP (1) JPS59154309A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2891715B2 (ja) * 1989-03-31 1999-05-17 キヤノン株式会社 縞走査型干渉測定装置
JP2631942B2 (ja) * 1993-06-25 1997-07-16 小松ゼノア株式会社 超小旋回パワショベル
JP3788894B2 (ja) * 2000-06-21 2006-06-21 日本電信電話株式会社 ３次元位置検出センサ及び位置決め方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2851750B1 (de) * 1978-11-30 1980-03-06 Ibm Deutschland Verfahren und Vorrichtung zur Messung der Ebenheit der Rauhigkeit oder des Kruemmungsradius einer Messflaeche
EP0075032B1 (de) * 1981-09-17 1986-01-08 Ibm Deutschland Gmbh Verfahren zur interferometrischen Oberflächentopographie
JPS58176511A (ja) * 1982-04-09 1983-10-17 Hitachi Ltd 干渉方法及びその装置
JPS58208610A (ja) * 1982-05-17 1983-12-05 ブリティッシュ・テクノロジー・グループ・リミテッド 物体の表面検査装置

Also Published As

Publication number Publication date
JPS59154309A (ja) 1984-09-03

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